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发明名称
Alignment stage device.
摘要
申请公布号
EP0327949(B1)
申请公布日期
1993.12.15
申请号
EP19890101756
申请日期
1989.02.01
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
NOMURA, TAKEHIKO C/O PATENT DIVISION;SUZUKI, RYOICHI C/O PATENT DIVISION
分类号
G03F7/20;H01L21/68;H05K13/08;(IPC1-7):H01L21/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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