INDUCTION COUPLING PLASMA CVD APPARATUS,申请号JP19950060701-传众专利搜索

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发明名称	INDUCTION COUPLING PLASMA CVD APPARATUS
摘要
申请公布号	JPH08260153(A)	申请公布日期	1996.10.08
申请号	JP19950060701	申请日期	1995.03.20
申请人	TOSHIBA MACH CO LTD	发明人	FUKUYAMA SATOSHI
分类号	H05H1/46;C23C16/50;H01L21/205;H01L21/31;(IPC1-7):C23C16/50	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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