| 摘要 |
PROBLEM TO BE SOLVED: To ensure high sensitivity, slight shrinkage of a film, high resolving power and slight deterioration of the resolving power and to improve stability by incorporating a compd. which generates an acid by the action of light or heat and a specified sulfonimido compd. SOLUTION: This compsn. contains a compd. which generates an acid by the action of light or heat and a sulfonimido compd. represented by the formula L1 -(SO2 -NR2 -SO2 -R1 )n , wherein (n) is an integer of 1-6, R1 is an arom. group, a substd. arom. group, an alkyl or a substd. alkyl, L1 is an arom. group, a substd. arom. group, an alkyl or a substd. alkyl in the case of n=1, L1 is a multivalent combining group consisting of nonmetallic atoms in the case of 2<=n<=6, the combining group may have a substituent, R2 is an optionally substd. alkoxymethyl, an optionally substd. arylmethyl or an optionally substd. alicyclic alkyl.
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