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发明名称
DRIER FOR SEMICONDUCTOR 1GDRAM
摘要
申请公布号
JPH10326766(A)
申请公布日期
1998.12.08
申请号
JP19960359625
申请日期
1996.12.09
申请人
HAMAYA SUMIO
发明人
HAMAYA SUMIO
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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