FILM FORMING DEVICE FOR OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To suppress a machine characteristic to be minimum while mechanical strength is maintained by heating a rear face being the opposite side of a film forming face in tical disk substrate at the time of forming a film in the optical disk substrate and reducing a temperature difference on two faces. SOLUTION: At the time of forming a film, sputter gas is introduced into a film forming room 4 and prescribed current is supplied to a resistance heater 3 and a rear face being the opposite side of the film forming face of the optical disk substrate 1 is heated when sputter potential is applied to a target 2. The temperature of the film forming face of the optical disk substrate 1 is detected by a thermocouple 6 and the temperature of the area face being the opposite side of the film forming face of the optical disk substrate 1 by thermocouple 7. A control part controls a prescribed current value supplied to the resistance heater 3 so that a temperature difference between the substrate film forming face and the substrate rear face becomes small. Thus, the deformation of the substrate owing to the temperature difference between the substrate film forming face and the substrate rear face can be relieved.