| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element, manufacturing method thereof, and liquid ejection head which can uniformize characteristics of a piezoelectric layer as well as improve the characteristics. <P>SOLUTION: A manufacturing method of a piezoelectric element comprises: a process for forming seed titanium layer by coating Titanium (Ti) at least twice or more on a lower electrode formed on a substrate; and a process for forming a piezoelectric precursor film by coating piezoelectric material on the seed titanium layer, and thereafter calcining the piezoelectric precursor film so as to crystallize, thereby forming a piezoelectric material layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
