发明名称 カウンタードープ防止を有する太陽電池の製造
摘要 A solar cell fabrication process includes printing of dopant sources over a polysilicon layer over backside of a solar cell substrate. The dopant sources are cured to diffuse dopants from the dopant sources into the polysilicon layer to form diffusion regions, and to crosslink the dopant sources to make them resistant to a subsequently performed texturing process. To prevent counter doping, dopants from one of the dopant sources are prevented from outgassing and diffusing into the other dopant source. For example, phosphorus from an N-type dopant source is prevented from diffusing to a P-type dopant source comprising boron.
申请公布号 JP5921540(B2) 申请公布日期 2016.05.24
申请号 JP20130518383 申请日期 2011.04.22
申请人 サンパワー コーポレイション 发明人 デニス、ティモシー ディー.;リ、ボ;カズンズ、ピーター ジョン
分类号 H01L31/068;H01L31/18 主分类号 H01L31/068
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