发明名称 |
CONTINUOUS CZOCHRALSKI METHOD AND APPARATUS |
摘要 |
The present invention relates to a Czochralski growth apparatus and method, preferably a continuous Czochralski growth apparatus and method, in which solid feedstock provided from a delivery system during ingot growth is substantially prevented from entering the growth zone of a crucible. In this way, an ingot having exceptionally consistent properties is produced. |
申请公布号 |
EP2893057(A4) |
申请公布日期 |
2016.06.15 |
申请号 |
EP20130835765 |
申请日期 |
2013.09.09 |
申请人 |
GTAT IP HOLDING LLC |
发明人 |
LUTER, WILLIAM, L.;HUANG, WEIDONG |
分类号 |
C30B15/02;C30B15/12;C30B29/06 |
主分类号 |
C30B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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