发明名称 CONTINUOUS CZOCHRALSKI METHOD AND APPARATUS
摘要 The present invention relates to a Czochralski growth apparatus and method, preferably a continuous Czochralski growth apparatus and method, in which solid feedstock provided from a delivery system during ingot growth is substantially prevented from entering the growth zone of a crucible. In this way, an ingot having exceptionally consistent properties is produced.
申请公布号 EP2893057(A4) 申请公布日期 2016.06.15
申请号 EP20130835765 申请日期 2013.09.09
申请人 GTAT IP HOLDING LLC 发明人 LUTER, WILLIAM, L.;HUANG, WEIDONG
分类号 C30B15/02;C30B15/12;C30B29/06 主分类号 C30B15/02
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