发明名称 MANUFACTURING METHOD OF STRUCTURE, MANUFACTURING METHOD OF LAMINATE, MANUFACTURING DEVICE OF STRUCTURE AND MANUFACTURING DEVICE OF LAMINATE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a structure, capable of firmly fixing organic compound metal complexes to each other by irradiating the organic compound metal complexes with an electromagnetic wave or a particle beam.SOLUTION: There is provided a manufacturing method of a structure that includes a plurality of organic compound metal complexes. The manufacturing method includes an irradiation step of irradiating the organic compound metal complexes with an electromagnetic wave or a particle beam. By the irradiation, the organic compound metal complexes are fixed to each other. The electromagnetic wave or the particle beam has energy more than energy exciting an inner shell electron on a metal atom in the organic compound metal complexes.SELECTED DRAWING: Figure 1
申请公布号 JP2016111260(A) 申请公布日期 2016.06.20
申请号 JP20140248919 申请日期 2014.12.09
申请人 OSAKA UNIV 发明人 SAITO AKIRA
分类号 H01L21/3205;H01L21/28;H01L21/285;H01L21/288;H01L21/768;H01L23/532 主分类号 H01L21/3205
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