发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device which recovers cutting water supplied to a cutting part formed by a cutting blade of cutting means and regenerates the recovered water into water harmless for a workpiece and can use the regenerated water.SOLUTION: The cutting device is provided that comprises: workpiece holding means for holding workpiece; cutting means including a cutting blade configured to be rotatable for cutting the workpiece held by the workpiece holding means; and a cutting water supply mechanism for supplying cutting water to a cutting work part formed by the cutting blade of the cutting means. The cutting device also comprises: cutting water receiving means for receiving the cutting water supplied to the cutting work part formed by the cutting blade of the cutting means; refuse removal means for removing refuse mixed in the cutting water received by the cutting water receiving means; and a pump for sending the cutting water from which the refuse have been removed by the refuse removal means, to the cutting water supply mechanism.SELECTED DRAWING: Figure 2
申请公布号 JP2016149403(A) 申请公布日期 2016.08.18
申请号 JP20150024392 申请日期 2015.02.10
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301;B23Q11/00;B23Q11/10 主分类号 H01L21/301
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