SPUTTERING TARGET, AND OPTICAL FUNCTION FILM FOR REDUCING METAL REFLECTIONS

摘要

PROBLEM TO BE SOLVED: To provide a film (as will be called an optical function film) which is formed so as to be adjacent to the wiring of a metal film in a touch panel, thereby to reduce the metallic sheen of the wiring pattern of a touch panel screen, and to provide a sputtering target for sputtering and forming the optical function film.SOLUTION: A sputtering target is made of a metal alloy containing 85 to 95 mass % of the total of one kind or two kinds of one of Cu and Fe and 5 to 15 mass% of the total of one kind or two kinds of Ni and Mn. An optical functional film is made of an oxide sputtered and filmed in an oxidizing atmosphere by using said target and has an average reflectance of 30% or less.SELECTED DRAWING: None