| 摘要 |
The wafer boat (1) is designed for purging of pressure and or liquid into purge channels defined along rods (16, 18) extending through spacers (31, 32) and provided with closing means (34, 35). The wafer boat (1) is preferably used in combination with a purge tool (100) suitable for use in a container (110) to be filled with cleaning liquid. The purge tool (100) is provided with connectors (150) and distribution means among which reservoirs (114) and channels (112). Therewith purging liquid or purging pressure may be applied to the purge channels within the wafer boat (1) via access holes located for communication with ends of rods (16, 18) of the wafer boat (1). The wafer boat (1) can be inserted into and removed from the tool (100) by means of suitable means, for instance a lever (120). |
