HEAT TREATMENT OF COMPOUND SEMICONDUCTOR SUBSTRATE,申请号JP19900133670-传众专利搜索

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发明名称	HEAT TREATMENT OF COMPOUND SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH0428221(A)	申请公布日期	1992.01.30
申请号	JP19900133670	申请日期	1990.05.23
申请人	MURATA MFG CO LTD	发明人	YAMAMOTO TEIJI;BENZAKI KIYOTAKA
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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