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发明名称
VAPORIZATION SOURCE DEVICE FOR HIGH-VAPOR-PRESSURE MATERIAL
摘要
申请公布号
JPH04160147(A)
申请公布日期
1992.06.03
申请号
JP19900283689
申请日期
1990.10.22
申请人
ULVAC JAPAN LTD
发明人
FUKAZAWA HIROYUKI;MESAKI YOSHINORI
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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