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发明名称
CLEANING RESERVOIR
摘要
申请公布号
JPH04247621(A)
申请公布日期
1992.09.03
申请号
JP19910012346
申请日期
1991.02.04
申请人
MATSUSHITA ELECTRON CORP
发明人
KATSUMA TSUNEYASU
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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