| 发明名称 |
PHOTOIMAGEABLE COMPOSITION |
| 摘要 |
Disclosed are photoimageable compositions containing silsesquioxane binder polymers and photoactive compounds, methods of forming relief images using such compositions and methods of manufacturing electronic devices using such compositions. Such compositions are useful as photoresists and in the manufacture of optoelectronic devices.
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| 申请公布号 |
WO02091083(A1) |
申请公布日期 |
2002.11.14 |
| 申请号 |
WO2002US14732 |
申请日期 |
2002.05.08 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
GRONBECK, DANA, A.;BARCLAY, GEORGE, G.;LINEHAN, LEO, L.;XIONG, KAO;KANAGASABAPATHY, SUBAREDDY |
| 分类号 |
G03C1/73;G03C1/76;G03C1/795;G03F7/00;G03F7/038;G03F7/039;G03F7/075;G03F7/11;G03F7/30;G03F7/40;H01L21/027;(IPC1-7):G03F7/029;G03F7/032;G03F7/004;G03C1/725 |
主分类号 |
G03C1/73 |
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