| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck of thin type formed in small size and with large clamp force generated, in the chuck radially arranging a cylinder relating to the main unit center. SOLUTION: A pressure chamber 15 supplying a fluid pressure for actuating a piston 3 in a direction of the main unit center is provided in each cylinder, a pressure chamber 16 connected by a fluid passage to supply a fluid pressure for actuating the piston toward outside from the main unit center is provided with a pressure chamber 16 common in all the cylinders in a part of the main unit center, a device constitution makes all the cylinders move toward outside from the main unit center by adding a fluid to this pressure chamber, and the columnar piston stored so as to be capable of reciprocating by a fluid pressure in the cylinder, making one end in a side of the main unit center a small diameter as compared with the other end, is formed in stepped shape, so that an advancing end of the piston can be set more adjacent to the main unit center.
|
