| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing method of a color filter for a liquid crystal display by which the entire face of the surface of the color filter can be further uniformly polished and variations of the film thickness of a colored layer can be remarkably reduced in polishing processing using an Oscar type polishing machine. <P>SOLUTION: When a polishing liquid is supplied to a polishing cloth by dripping it with a tube pump, the opening area of a discharge port of the tube is set to ≤ 0.75 mm<SP>2</SP>, the discharge amount of the polishing liquid is set to 5-20 g/min, and the polishing liquid is continuously supplied during polishing. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
