发明名称 APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND HIGH-PRESS SHOWER UNIT OF DISPLAY DEVICE
摘要 <p>A manufacturing apparatus of a display device and a high-pressure shower unit for a display device are provided to prevent residues of liquefied chemicals on a cover by forming the cover with a tilted structure. A manufacturing apparatus of a display device includes a transfer unit(10) for transferring a substrate(5) for display device, a loader unit for loading the substrate into the transferring unit, and a processing liquid injection unit for injecting a processing liquid onto the substrate. The processing liquid injection unit includes a processing liquid supply part having a nozzle portion for injecting the processing liquid onto the substrate and a downward inclined cover formed at an upper part of the processing liquid supply part.</p>
申请公布号 KR20070093717(A) 申请公布日期 2007.09.19
申请号 KR20060023956 申请日期 2006.03.15
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 OH, SE YOON;LEE, MYOUNG KI;KANG, SEUNG BAE
分类号 H01L21/027 主分类号 H01L21/027
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