发明名称 |
APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND HIGH-PRESS SHOWER UNIT OF DISPLAY DEVICE |
摘要 |
<p>A manufacturing apparatus of a display device and a high-pressure shower unit for a display device are provided to prevent residues of liquefied chemicals on a cover by forming the cover with a tilted structure. A manufacturing apparatus of a display device includes a transfer unit(10) for transferring a substrate(5) for display device, a loader unit for loading the substrate into the transferring unit, and a processing liquid injection unit for injecting a processing liquid onto the substrate. The processing liquid injection unit includes a processing liquid supply part having a nozzle portion for injecting the processing liquid onto the substrate and a downward inclined cover formed at an upper part of the processing liquid supply part.</p> |
申请公布号 |
KR20070093717(A) |
申请公布日期 |
2007.09.19 |
申请号 |
KR20060023956 |
申请日期 |
2006.03.15 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
OH, SE YOON;LEE, MYOUNG KI;KANG, SEUNG BAE |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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