| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device whose case body can be conveyed even to a narrow section, and whose maintenance and check can be simply carried out, and to provide its exposure method. <P>SOLUTION: The case body of an exposure device alternately conveys vertically arranged exposure object members to an exposure part, and simultaneously exposes surfaces and back faces of the exposure object members. The device configured of a plurality of case body units comprising at least an exposure object member placing part case body unit, a vertical exposure device part case body unit, an exposure object member placing part case body unit, and a power source case body unit arranged at the rear part of the vertical exposure device case body unit. Thus, it is possible to provide an exposure device and its exposure method for carrying out the exposure of the exposure object members. <P>COPYRIGHT: (C)2007,JPO&INPIT |
