发明名称 OPTICAL SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To maintain proper light transmittance over a long time. <P>SOLUTION: An optical system comprises a plurality of optical elements, a means for holding spaces between optical elements in atmospheres different from the external environment, and a means for arbitrarily adjusting the moisture concentration in each of the atmospheres. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007142244(A) 申请公布日期 2007.06.07
申请号 JP20050335548 申请日期 2005.11.21
申请人 CANON INC 发明人 HIROO RYUJI
分类号 H01L21/027 主分类号 H01L21/027
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