CAPACITOR WITH PILLAR TYPE STORAGE NODE AND METHOD FOR FABRICATING THE SAME
摘要
A capacitor includes a pillar-type storage node, a supporter filling an inner empty crevice of the storage node, a dielectric layer over the storage node, and a plate node over the dielectric layer.
申请公布号
US2009008743(A1)
申请公布日期
2009.01.08
申请号
US20080164073
申请日期
2008.06.29
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE KEE-JEUNG;SONG HAN-SANG;KIL DEOK-SIN;KIM YOUNG-DAE;KIM JIN-HYOCK;DO KWAN-WOO;PARK KYUNG-WOONG
