| 摘要 |
A vaporizer (300) is formed by connecting block-like vaporization modules (310). Each vaporization module has an ejection opening for a liquid raw material; a vaporization chamber (370) for vaporizing the liquid raw material, which is ejected from the ejection opening, to create raw material gas; a liquid raw material flow path (320) formed so as to penetrate through joint surfaces joined to other vaporization modules; and a spray nozzle communicated with a portion in the middle of the liquid-like raw material flow path and leading the liquid-like raw material, which flows in the flow path, to the ejection opening. Each vaporization moduleis connected at its joint surface to each of the other vaporization modules to cause the liquid-like flow paths of all the vaporization modules to be communicated with each other. When various flow rates ranging from low to high is required, the structure of the evaporator can be easily changed according to such rates without a reduction in evaporation efficiency.
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