Electron beam exposure apparatus

摘要

An electron beam exposure apparatus comprising: column 1 for irradiating an electron beam to wafer 10 serving as a sample; sample chamber 3 having vacuum pump 40 as a vacuum exhaustion unit for controlling the internal unit to a vacuum atmosphere; stage 4 A arranged in the sample chamber 3 for holding and moving the wafer 10; and first mounting 5 A for elastically supporting the column 1 with respect to the sample chamber 3.