Gas coupled probe for substrate temperature measurement

摘要

A low pressure temperature sensor for measuring the temperature of a substrate during semiconductor device manufacturing is generally described. Various embodiments describe a gas chamber having an opening disposed within a dielectric plate of a platen with a seal disposed around the opening in the gas chamber such that the opening in the gas chamber may be sealed against the substrate. Furthermore, a temperature sensor and a spring are disposed in the gas chamber, the spring biased to place the temperature sensor in contact with the substrate. Additionally, a gas source configured to pressurize the gas chamber with a low pressure gas in order to increase thermal conductivity between the substrate and the temperature sensor is provided.

主权项

1. An assembly for measuring the temperature of a substrate during a semiconductor manufacturing processing comprising:
a temperature sensor for measuring the temperature of a substrate; a gas chamber configured to be disposed entirely on a backside of the substrate, the gas chamber having an opening and being disposed around the temperature sensor; a seal disposed around the opening in the gas chamber, the seal configured to seal the opening in the gas chamber against the substrate; and a spring disposed within the gas chamber, the spring biased to place the temperature sensor in contact with the substrate.