发明名称 DIE COATER
摘要 PROBLEM TO BE SOLVED: To reduce vibration of a nozzle unit.SOLUTION: A die coater includes a slot die (2) having a discharge port (3) extending in a given direction and moves the slot die (2) in a given direction perpendicular to the direction that the discharge port (3) extends or moves a workpiece (1) in an opposite direction of the given direction and concurrently discharges a coating liquid from the discharge port (3) to the workpiece (1) from above with the discharge port (3) oriented to the workpiece (1) to coat one surface of the workpiece (1) with the coating liquid. The slot die (2) includes at least one or more dampers (7).SELECTED DRAWING: Figure 1
申请公布号 JP2016149434(A) 申请公布日期 2016.08.18
申请号 JP20150025198 申请日期 2015.02.12
申请人 TOPPAN PRINTING CO LTD 发明人 ARAHORI KAZUMA
分类号 H01L21/027;B05C5/02;B05C11/00 主分类号 H01L21/027
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