Guide plate for probe card

摘要

The invention provides a guide plate for a probe card including a silicon substrate including a surface and a through-hole, an edge part of the through-hole, and a curved-face part. The through-hole is configured to guide a probe and includes an inner wall face. The edge part of the through-hole is constituted by the surface of the silicon substrate and the inner wall face of the through-hole. The curved-face part is formed on the edge part and formed of a silicon dioxide film.

主权项

1. A guide plate for a probe card, the guide plate comprising:
a silicon substrate including a surface and a through-hole, the through-hole being configured to guide a probe and including an inner wall face; an edge part of the through-hole, the edge part being constituted by the surface of the silicon substrate and the inner wall face of the through-hole; and a curved-face part formed on the edge part, the curved-face part being formed of a silicon dioxide film, being rounded in an arc shape, and extending from the surface of the silicon substrate to the inner wall face of the through-hole.