Mass transfer tool manipulator assembly with remote center of compliance

摘要

Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

主权项

1. A remote center robot, comprising:
a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm having a first length, wherein the first link arm is coupled to a first coupler link by the first lower joint; and a second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm having a second length equal to the first length, wherein the second link arm is coupled to a second ground link by the second upper joint, and wherein the second ground link is fixed to the first coupler link.