| 摘要 |
PURPOSE:To continuously and efficiently obtain high-purity AlN at a low cost by continuously introducing a mixture of aluminum hydroxide with a carbonaceous substance at a specific ratio into a tunnel kiln and reacting the mixture with countercurrently introduced nitrogen gas at a specified high temperature. CONSTITUTION:A mixture of 70-75wt.% aluminum hydroxide with 30-25wt.% carbonaceous substance (e.g. carbon black) is prepared. The resultant mixture is then continuously fed into a tunnel kiln and brought into contact with nitrogen gas introduced countercurrently in the transfer direction of the mixture at 1600-1700 deg.C temperature to initiate reaction expressed by the formula. Thereby, aluminum nitride is continuously produced. As a result, since CO, H2O gases, etc., formed by the reaction are directly discharged to the outside of the system and the reaction product is constantly brought into contact with the fresh nitrogen gas to completely finish the reaction, the objective high-purity aluminum nitride can be obtained. |
