| 摘要 |
PURPOSE:To enable increasing the machining speed by keeping the sizepower of a laser beam oscillator 1, as it is. CONSTITUTION:The pulse laser beam A emitted from the laser beam oscillator 1 is distributed into plural beams by a beam distributor 2. The transmitted beam B drives a machining head 3A and the head machine a sample 4 on an XYstage 5. In the mean time, the reflected beam C drives a machining head 3B and the head machines the sample 4 at the other area from the area machined by 3A at the time same time. By the transmission, reflection or reflection at the different angle of the laser beam, such the distributor 2 realizes simultaneous multiarea machining. These oscillator 1, distributor 2 and stage 5 are synchronously controlled by a control system 6. |
