发明名称 |
Gas photonanograph for producing and optically analyzing nanometre scale patterns |
摘要 |
Gas photonanograph for the production and optical analysis of nanometer scale patterns. The photonanograph has a gas expansion chamber equipped with a gas supply for producing patterns and provided at a first end with microcapillaries for the discharge of the gas, an optical fibre, which is sharp at a first end and which is to be positioned facing the sample to be treated, a light source coupled to the second end of the optical fibre, the latter being transparent to the light emitted by the light source, and detecting and processing apparatus for monitoring a light signal reflected by the sample. The photonanograph permits the localized etching or deposition of materials for microelectronics or microoptoelectronics.
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申请公布号 |
US5405481(A) |
申请公布日期 |
1995.04.11 |
申请号 |
US19920989130 |
申请日期 |
1992.12.11 |
申请人 |
LICOPPE, CHRISTIAN;BENSOUSSAN, MARCEL |
发明人 |
LICOPPE, CHRISTIAN;BENSOUSSAN, MARCEL |
分类号 |
C23F4/02;C23C16/04;C23C16/52;G01N21/27;G01N21/55;G01Q70/06;G01Q80/00;H01L21/205;H01L21/268;H01L21/302;H01S3/00;(IPC1-7):B23K26/00 |
主分类号 |
C23F4/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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