发明名称 Capacitor and method of formation and a memory cell formed therefrom
摘要 A capacitor for use in a memory cell (10). A transistor is formed overlying a substrate (10). The transistor has a first current electrode (16) and a second current electrode (18). The current electrodes (16 and 18) are separated by a channel region. A gate electrode (26) is formed overlying the channel region and is physically separated from the channel region by a gate dielectric layer (24). A plug region (32) is formed overlying and electrically connected to the first current electrode (16). An annular high-permittivity dielectric region (33) is formed overlying the transistor and is formed from a high-permittivity dielectric layer (36). A first capacitor electrode is formed via a conductive region (38''), and a second capacitor electrode is formed via a conductive region (38'). The memory cell (10) can be formed as a non-volatile memory cell or a DRAM cell depending upon various properties of the annular high-permittivity dielectric region (33).
申请公布号 US5405796(A) 申请公布日期 1995.04.11
申请号 US19940182470 申请日期 1994.01.18
申请人 MOTOROLA, INC. 发明人 JONES, JR., ROBERT E.
分类号 H01G4/33;H01G4/40;H01L21/02;H01L21/822;H01L21/8242;H01L27/04;H01L27/108;(IPC1-7):H01L27/108 主分类号 H01G4/33
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