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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH09213940(A)
申请公布日期
1997.08.15
申请号
JP19960018670
申请日期
1996.02.05
申请人
HITACHI LTD
发明人
HASHIMOTO TAKASHI
分类号
H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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