METHOD FOR MANUFACTURING LCD

摘要

A method for manufacturing an LCD(Liquid Crystal Display) is provided to prevent particles from entering chambers and reduce a substrate conveying time when a substrate is conveyed from a chamber to another chamber by performing an exposure and development process and a dry etching process in the same chamber. A substrate coated with photoresist is exposed in a first chamber and the exposed substrate is developed in the first chamber in such a manner that a developer is sprayed to the exposed substrate, by an exposure and developing process apparatus(400). The developed substrate is dry-etched through a dry etching process apparatus(500) by using atmospheric plasma in the first chamber.