Ion beam vacuum sputtering apparatus and method,申请号GB19990022110-传众专利搜索

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发明名称	Ion beam vacuum sputtering apparatus and method
摘要
申请公布号	GB9922110(D0)	申请公布日期	1999.11.17
申请号	GB19990022110	申请日期	1999.09.17
申请人	NORDIKO LIMITED	发明人
分类号	G21K5/04;C23C14/46;H01J27/16;H01J37/08;H01J37/304;H01J37/34;H05H1/24	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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