发明名称 Driving apparatus and exposure apparatus
摘要 A driving apparatus which drives an object. The apparatus includes an electromagnetic actuator having a movable element and a stator, a surrounding member surrounding a heat portion of the electromagnetic actuator, a beam which provides the object with a driving force in accordance with movement of the movable element, a connecting member connecting the movable element and the beam, wherein the surrounding member has an opening allowing the movement of the movable element, the opening being arranged at a portion of the surrounding member not facing the object, and a heat recovery unit arranged at a position facing the opening.
申请公布号 US7239051(B2) 申请公布日期 2007.07.03
申请号 US20050074710 申请日期 2005.03.09
申请人 CANON KABUSHIKI KAISHA 发明人 TANAKA HIDEO
分类号 G03F7/20;H02K41/00;G03B27/52;G03B27/58;H01L21/027;H02K9/19;H02K41/02;H02K41/03 主分类号 G03F7/20
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