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经营范围
发明名称
Method of reforming a tip portion of a probe
摘要
申请公布号
EP0893694(A3)
申请公布日期
2002.09.25
申请号
EP19980104224
申请日期
1998.03.10
申请人
JAPAN ELECTRONICS MATERIALS CORPORATION
发明人
OKUBO, MASAO;OKUBO, KAZUMASA;IWATA, HIROSHI
分类号
G01R1/067;H01L21/66;(IPC1-7):G01R1/067;G01R3/00
主分类号
G01R1/067
代理机构
代理人
主权项
地址
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