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发明名称
Micromechanical device and process for the manufacture of a micromechanical device
摘要
申请公布号
EP1228998(B1)
申请公布日期
2006.06.14
申请号
EP20010125720
申请日期
2001.10.27
申请人
ROBERT BOSCH GMBH
发明人
FISCHER, FRANK;HEIN, PETER, DR.;GRAF, ECKHARD
分类号
B81B3/00;B81C99/00;B81B7/00;B81C1/00;B81C3/00
主分类号
B81B3/00
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代理人
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