Method for determining crystalline orientation using raman spectroscopy

摘要

A method of determining the crystalline orientation of a crystal surface of a workpiece using Raman spectroscopy. A beam of substantially monochromatic light is directed to be incident on the crystal surface at a predetermined angle of incidence. The beam of light is substantially polarized. The workpiece is rotated relative to the beam of light about a rotation axis substantially normal to the crystal surface. A Raman shift of scattered light is measured at each of a number of rotational positions during the rotation of the workpiece. The crystalline orientation of the crystal surface is determined based on the measured Raman shifts. Data indicating the determined crystalline orientation of the crystal surface is stored.