THE APPARATUS FOR ELECTROLYTIC POLISHING AND MASK THEREUSED

摘要

An electrolytic polishing equipment and a method for electrolytic polishing of the mask using the same are provided to more easily perform electrolytic polishing by removing an electric double layer formed on a mask. In an equipment(200) for electrolytic polishing of a mask(220) in which an opening is formed, the equipment comprises: an electrolyzer(210) in which an electrolyte(211) is contained such that the mask is immersed into the electrolyte; a first electrode(230) of which a portion is immersed into the electrolyte, and which comes in contact with the mask to supply a positive electric charge to the mask; a second electrode(240) of which a portion is immersed into the electrolyte, and which has a negative electric charge; and an auxiliary electrode(250) installed in at least one side of a zone corresponding to the mask, wherein the equipment further comprises a bubble generation part(270) formed in one zone within the electrolyte. The equipment further comprises a bubble generation drive part(280) and a power supply unit(260).