发明名称 |
WAFER WITH EDGE NOTCHES ENCODING WAFER IDENTIFICATION DESCRIPTOR |
摘要 |
An apparatus includes a semiconductor wafer having a surface terminating in an edge. A plurality of notches is defined along the edge. The plurality of notches encodes a wafer identification descriptor for the wafer. A system for identifying wafers includes a wafer sorter. The wafer sorter is adapted to scan at least a portion of a wafer including the plurality of notches and decode the scan of the plurality of notches to generate a wafer identification descriptor for the wafer.
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申请公布号 |
US2009057837(A1) |
申请公布日期 |
2009.03.05 |
申请号 |
US20070849775 |
申请日期 |
2007.09.04 |
申请人 |
MARSHALL LESLIE;GOFF GERALD L |
发明人 |
MARSHALL LESLIE;GOFF GERALD L. |
分类号 |
H01L29/06;G01B11/00 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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