发明名称 RESISTOR OF FLASH MEMORY DEVICE AND METHOD OF FABRICATION THE SAME
摘要 PURPOSE: A resistor of a flash memory device and a method of fabrication the same are provided to implement a resistor with uniform resistance by forming a conductive film to have a uniform thickness. CONSTITUTION: A first insulating layer(101) is formed on a semiconductor substrate(100). A trench for a register is formed on the first insulating layer. A conductive film(104) for the register is formed in the trench for the register. The conductive film for the register is a polysilicon layer. The conductive film for the register has the uniform thickness. A second insulating layer(105) is formed on the first insulating layer including the conductive film for the register. A contact(107) is passed through a second insulating layer and is connected to both ends of the conductive film for the register.
申请公布号 KR20100013982(A) 申请公布日期 2010.02.10
申请号 KR20080075746 申请日期 2008.08.01
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, YOUNG BOK
分类号 H01L21/8247 主分类号 H01L21/8247
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