| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens holding device which securely holds a lens in a desired attitude.SOLUTION: A lens holding device includes: a suction frame 12 which has a first opening 12a and an edge portion 12b, and sucks a lens; a second opening 11a and an optical member 19 blocking the second opening 11a; frame means 10 which has a plurality of protruding claw portions 13b extending from a circumference around a second opening 13a, and movably stores the suction frame on a second opening inner periphery; an annular first seal 14 provided between the second opening inner periphery and a suction frame outer periphery; an annular second seal 15 which is aligned in an opening direction separately from the first seal between the second opening inner periphery and the suction frame outer periphery, and is shorter than the annular length of the first seal; blowing-in means 17 which blows in a fluid between the first and second seals to move the suction frame in an U-direction; energizing means 16 which is provided between the frame means and the suction frame, and energizes the suction frame in a D-direction; and sucking means 18 which sucks gas from a space surrounded by the suction frame, the frame means, the optical member, the first seal, and the lens so as to energize the lens and the suction frame in the U-direction and make them abut on the claw portions while a ring annular portion and a lens surface abut on each other.SELECTED DRAWING: Figure 3 |
