发明名称 シート貼付装置およびシート貼付方法
摘要 PROBLEM TO BE SOLVED: To provide a sheet adhering device capable of preventing deterioration of a processing capacity per unit time by replenishing a frame member without stopping an operation of the device.SOLUTION: A sheet adhering device 1 comprises: holding means 4 capable of holding frame housing means 3 capable of housing plural frame members RF integrated with a deposited object WF via an adhesive sheet AS at a supply position P3; support means 6 for supporting at least the frame member RF out of the frame member RF and the deposited object WF; transfer means 7 for transferring the frame member RF to the support means 6 from the frame housing means 3 held at the supply position P3; and adhesion means 9 for adhering the adhesive sheet AS into contact with the frame member RF or the frame member RF and the deposited object WF supported by the support means 6. The holding means 4 capable of holding plural frame housing means 3 has conveyance means 44 for sequentially conveying the frame housing means 3 to the supply position P3.
申请公布号 JP5973813(B2) 申请公布日期 2016.08.23
申请号 JP20120152243 申请日期 2012.07.06
申请人 リンテック株式会社 发明人 加藤 秀昭;山口 和寿
分类号 H01L21/677;H01L21/683 主分类号 H01L21/677
代理机构 代理人
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