FEEDER SYSTEM AND METHOD FOR A VAPOR TRANSPORT DEPOSITION SYSTEM

摘要

An improved feeder system and method for a vapor transport deposition system that includes a carrier gas bypass flow line to allow for continuous carrier gas flow to a vaporizer unit when a vibratory unit which supplies powdered material and carrier gas to the vaporizer unit is out of service. A process gas flow line to the vibratory unit may be included when the powdered material contains a powdered dopant in the material mix.

主权项

1. A system comprising:
a powder vibratory unit for providing a powder semiconductor material; a carrier gas input flow line for directing a carrier gas into the powder vibratory unit; a process gas input flow line for directing a process gas into the powder vibratory unit; and an output flow line for directing an output of the powder vibratory unit to a vaporizer unit.