MEMS AND/OR NEMS DYNAMIC PRESSURE SENSOR WITH IMPROVED PERFORMANCES AND MICROPHONE COMPRISING SUCH A SENSOR

摘要

Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.

主权项

1. Dynamic pressure sensor of MEMS and/or NEMS type comprising:
a support, at least one rigid sensitive element anchored to the support at the level of at least one anchoring zone, said sensitive element comprising parallel first and second faces intended to be subjected to pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference between the first and second faces, an anchoring device for anchoring the sensitive element to the support, said anchoring device comprising at least one beam rotationally articulated on the support by an articulation of which the axis of rotation is parallel to the plane of the sensor, a force detector for detecting a force applied to the sensitive element by the pressure difference.