Interleaved Acousto-Optical Device Scanning For Suppression Of Optical Crosstalk

摘要

A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

主权项

1. An inspection system for inspecting a sample, the inspection system comprising:
a moveable platform system configured to secure said sample; an illumination system configured to simultaneously generate a plurality of co-linear scans aligned along a co-linear scan line such that each scan is formed by a sweep of a spot by an acousto-optical device (AOD) along the co-linear scan line, and such that the plurality of co-linear scans are directed onto the secured sample and separated by a predetermined spacing; and a controller configured to control the moveable platform system such that the secured sample is repeatedly stepped relative to the illumination system in a direction perpendicular to the co-linear scan line and in coordination with the generation of the plurality of co-linear scans such that a first plurality of swaths are formed by repeatedly generating the plurality of co-linear scans in a direction perpendicular to the co-linear scan line, the first plurality of swaths having an inter-swath spacing of the predetermined spacing.