发明名称 Method for coating a substrate.
摘要 The invention relates to coating substrates provided with vias. In this context, the problem occurs whereby the coating agent encloses air in the vias. This is disadvantageous for the planarity of the surface. To solve this problem, the invention provides a method for coating a substrate provided with vias in which the following steps are carried out: the substrate is conditioned; and the substrate is coated with an insulating material.
申请公布号 NL2014598(A) 申请公布日期 2016.10.12
申请号 NL20152014598 申请日期 2015.04.08
申请人 SUSS MICROTEC LITHOGRAPHY GMBH 发明人 KATRIN FISCHER;FLORIAN PALITSCHKA;DARREN ROBERT SOUTHWORTH;WILLIAM WHITNEY
分类号 H01L21/768;H01L21/027 主分类号 H01L21/768
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