| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an enhanced ultrasonic transducer comprising a piezoelectric layer having a high piezoelectric coupling coefficient (k). <P>SOLUTION: This invention relates to an array of ultrasonic transducers each comprising a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient (k) and is textured. The invention further relates to an ultrasonic transducer and to a method of manufacturing an array of ultrasonic transducers. <P>COPYRIGHT: (C)2007,JPO&INPIT |
