CHEMICAL MECHANICAL POLISHER AND PROCESS FOR THE SAME,申请号KR20050130935-传众专利搜索

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发明名称	CHEMICAL MECHANICAL POLISHER AND PROCESS FOR THE SAME
摘要
申请公布号	KR100744221(B1)	申请公布日期	2007.07.30
申请号	KR20050130935	申请日期	2005.12.27
申请人		发明人
分类号	B24B37/04;B24B37/08;B24B57/00;H01L21/304	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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